Ion-Induced Surface Diffusion in Ion Sputtering

Preprint

17 January 1997

preprint
Published by arXiv in arXiv

https://doi.org/10.48550/arXiv.cond-mat/9701116

Abstract

Ion bombardment is known to enhance surface diffusion and affect the surface morphology. To quantify this phenomenon we calculate the ion-induced diffusion constant and its dependence on the ion energy, flux and angle of incidence. We find that ion bombardment can both enhance and suppress diffusion and that the sign of the diffusion constant depends on the experimental parameters. The effect of ion-induced diffusion on ripple formation and roughening of ion-sputtered surfaces is discussed and summarized in a morphological phase diagram.

Keywords

DIFFUSION CONSTANT
INDUCED DIFFUSION
SURFACE DIFFUSION
ION BOMBARDMENT
SPUTTERING ION
ION INDUCED
MORPHOLOGY

All Related Versions

Version 1, 1997-01-17, ArXiv
Published version: Applied Physics Letters, 71 (19), 2800.

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