Structural and Chemical Microanalysis of Oxygen-Bearing Precipitates in Silicon
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Identification of oxide precipitates in annealed silicon crystalsApplied Physics Letters, 1978
- Formulae for light-element micro analysis by electron energy-loss spectrometryUltramicroscopy, 1978
- Characterization of structural defects in annealed silicon containing oxygenJournal of Applied Physics, 1976