Combination of contour and half-tone masks used in laser ablation
- 14 December 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 168 (1-4) , 178-181
- https://doi.org/10.1016/s0169-4332(00)00585-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Graded transmission dielectric optical masks by laser ablationApplied Surface Science, 1998
- Design and performance of an excimer-laser based optical system for high precision microstructuringOptics & Laser Technology, 1998
- Excimer laser machining for the fabrication of analogous microstructuresApplied Surface Science, 1996
- Ablative photodecomposition of polymer films by pulsed far‐ultraviolet (193 nm) laser radiation: Dependence of etch depth on experimental conditionsJournal of Polymer Science: Polymer Chemistry Edition, 1984