On the Adhesion of LPCVD WSi2 to Doped and Undoped Polysilicon
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Lateral HVIC with 1200-V bipolar and field-effect devicesIEEE Transactions on Electron Devices, 1986
- Properties of low-pressure CVD tungsten silicide for MOS VLSI interconnectionsIEEE Transactions on Electron Devices, 1983
- Refractory metal silicon device technologySolid-State Electronics, 1968