Low temperature deposition of hexagonal BN films by chemical vapour deposition
- 1 February 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 88 (3) , 269-274
- https://doi.org/10.1016/0040-6090(82)90056-6
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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