Characterization of ion-beam mixed multilayers via grazing x-ray reflectometry
- 1 December 1988
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 3 (6) , 1089-1096
- https://doi.org/10.1557/jmr.1988.1089
Abstract
The grazing x-ray reflectrometry technique was used as a way to study modifications in metallic multilayers induced by ion-beam irradiation. Due to the high sensitivity of the technique, short-range atomic displacements of an atom A in a layer B can be detected so that the first stages of ion-beam mixing can be investigated. The rate of mixing is measured and the compound A1−xBxformed at the layers' interfaces is characterized.Keywords
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