The Structure of Co–Cr Films Sputtered onto a Moving Substrate

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Abstract
Transmission electron micrographs, microbeam electron diffraction and X-ray pole figures were employed in order to elucidate the structure of Co–Cr films formed by facing targets sputtering. The c-axes of the hcp structure of the microcrystallites deposited on a static polyethylene terephthalate substrate had a sharp distribution around the normal of the film plane at the center of the deposition area, but were inclined slightly at the edge with respect to the target configuration. For a Co–Cr permalloy double-layered film formed on a moving substrate, the c-axes of individual crystallites scattered considerably, although the average was maintained along the normal of the film plane, with a slight tilt toward the forward-moving direction.