Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine
- 1 November 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 220 (1-2) , 295-302
- https://doi.org/10.1016/0040-6090(92)90588-3
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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