In situ reflectance difference spectroscopy of N-plasma doped ZnTe grown by molecular beam epitaxy

In situ reflectance difference spectroscopy (RDS) has been performed during growth and nitrogen-doping of ZnTe thin films fabricated by molecular beam epitaxy. The doping level of the ZnTe samples can be determined by evaluating the RD spectra in the vicinity of the $E_1$ and $E_1{\mathrm{+\Delta }}_1$ transitions. RDS features in this spectral range were used to optimize online the doping performance of the N-plasma cell. Furthermore, doping-induced surface processes have been investigated, like surface saturation with activated N species and surface Fermi level pinning occurring at ambient pressure.