Single-structure heater and temperature sensor using a p-type polycrystalline diamond resistor
- 1 May 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 17 (5) , 250-252
- https://doi.org/10.1109/55.491845
Abstract
Heat generation and temperature sensing are reported in a single p-type diamond resistor fabricated on an oxidized Si substrate using diamond film technology compatible with integrated circuit (IC) processing. Power densities in excess of 600 W/in./sup 2/ are observed for the heaters. The temperature response of the sensor is characterized in the temperature range of 300-725 K. Such a diamond heater/sensor device is reported for the first time.Keywords
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