E-beam fault diagnosis system for logic VLSIs
- 31 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 16 (1-4) , 121-128
- https://doi.org/10.1016/0167-9317(92)90332-l
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Multi-sampling method in an EBT for logic waveform measurementMicroelectronic Engineering, 1990
- A Fully-Automated Electron Beam Test System for VLSI CircuitsIEEE Design & Test of Computers, 1985