High performance electron optical column for testing ICs with submicrometer design rules
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 7 (2-4) , 163-172
- https://doi.org/10.1016/s0167-9317(87)80008-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Energy broadening in electron beams: A comparison of existing theories and Monte Carlo simulationJournal of Vacuum Science & Technology B, 1985
- Local field effects on voltage contrast in the scanning electron microscopeJournal of Physics D: Applied Physics, 1981
- Voltage measurement in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1968