Effect of noble gas ions on the synthesis of c-BN by ion beam assisted deposition
- 1 May 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 89 (1-4) , 369-372
- https://doi.org/10.1016/0168-583x(94)95202-7
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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