Electron beam testing: Methods and applications
- 1 January 1983
- Vol. 5 (1) , 14-24
- https://doi.org/10.1002/sca.4950050103
Abstract
There are eight e‐beam methods of testing integrated circuits. The principle and performance of the various methods will be discussed in this paper. The performance criteria are voltage resolution and the frequency range in which voltage changes can be detected. From this it is possible to decide which methods are best suited for testing the various IC types available today.Keywords
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