Rapid Thermal Annealing of Si-Implanted GaAs
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Infrared rapid thermal annealing of Si-implanted GaAsApplied Physics Letters, 1982
- Incoherent annealing of implanted layers in GaAsIEEE Electron Device Letters, 1982
- Proximate capless annealing of GaAs using a controlled-excess As vapor pressure sourceApplied Physics Letters, 1981
- Radiation Annealing of GaAs Implanted with SiJapanese Journal of Applied Physics, 1981