Application of factor analysis to elemental detection limits in sputter depth profiling
- 1 October 1986
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 26 (4) , 561-574
- https://doi.org/10.1016/0169-4332(86)90127-3
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Surface analysis, ion implantation and tribological processes affecting steelsApplications of Surface Science, 1984
- Background subtraction techniques in surface analysisJournal of Vacuum Science & Technology A, 1984
- Principal Component Analysis as a Method for Silicide Investigation with Auger Electron SpectroscopyPhysica Status Solidi (a), 1983
- Factor analysis for separation of pure component spectra from mixture spectraAnalytical Chemistry, 1983
- Characterization of the initial growth of Si on cubic stabilized zirconiaJournal of Vacuum Science & Technology A, 1983
- Application of Auger line shapes and factor analysis to characterize a metal-ceramic interfacial reactionJournal of Vacuum Science and Technology, 1982
- Principal component analysis of Auger line shapes at solid—solid interfacesApplications of Surface Science, 1981
- Determination of the number of factors and the experimental error in a data matrixAnalytical Chemistry, 1977
- Determination of the number of species present in a system. New matrix rank treatment of spectrophotometric dataThe Journal of Physical Chemistry, 1971