Statistical process simulation for CAD/CAM
- 6 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 13.5/1-13.5/4
- https://doi.org/10.1109/cicc.1988.20860
Abstract
The authors formulate necessary conditions for predictive process simulation: physically-based models and tuning to manufacturing data, which are essential for CAM (computer-aided manufacturing) applications. They illustrate these predictive capabilities by applying the statistically based IC fabrication simulator FABRICS to the outcome of an industrial, scaled-down CMOS fabrication process. From the accuracy of the results, it is evident that the process simulation system based on physical models can be tuned to a desired accuracy.Keywords
This publication has 3 references indexed in Scilit:
- The process engineer's workbenchIEEE Journal of Solid-State Circuits, 1988
- Parameter Extraction for Statistical IC Process CharacterizationIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1986
- FABRICS II: A Statistically Based IC Fabrication Process SimulatorIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1984