GaAs-compatible surface-micromachined RF MEMS switches
- 4 February 1999
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 35 (3) , 224-226
- https://doi.org/10.1049/el:19990032
Abstract
A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 µs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured.Keywords
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