Electron Cyclotron Resonance CVD of Silicon Oxynitride for Optoelectronic Applications
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Guided-Wave OptoelectronicsPublished by Springer Nature ,1990
- Generalized rotating-compensator ellipsometrySurface Science, 1976
- Integrated Optics: An IntroductionBell System Technical Journal, 1969