Low-temperature dry etching of metal oxides and ZnS via formation of volatile metal β-diketonate complexes
- 1 January 1992
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 2 (8) , 893-894
- https://doi.org/10.1039/jm9920200893
Abstract
The reactions of CuO, PbO, ZnO, ZnS, V2O5, PbTiO3, PbZrO3, and YBa2Cu3O7–x, with 1,1,1,5,5,5-hexafiuoroacetyl-acetone result in formation of the corresponding metal β-diketonates with etch rates of 1 µm min–1for mixed copper(I)/(II) oxide films.Keywords
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