A new type of transducer for partial pressure control
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (3-4) , 939-947
- https://doi.org/10.1016/0257-8972(88)90034-5
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Rate controlling and composition analysis of alloy deposition processes by electron impact emission spectroscopy (EIES)Journal of Vacuum Science and Technology, 1977