In situ study of interface reactions of ion beam sputter deposited (Ba0.5Sr0.5)TiO3 films on Si, SiO2, and Ir
- 1 July 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (4) , 1880-1886
- https://doi.org/10.1116/1.582099
Abstract
No abstract availableKeywords
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