Improvement in IR properties of chemically vapour-deposited diamond films by smoothening with KrF excimer radiation
- 1 April 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (5-7) , 678-682
- https://doi.org/10.1016/0925-9635(93)90203-e
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Diamond film preparation by arc-discharge plasma-jet-CVD and thermodynamic calculation of the equilibrium gas compositionDiamond and Related Materials, 1992
- The influence of methane concentration, substrate temperature, and pressure on the morphology of diamond films grown by dc plasma jet CVDDiamond and Related Materials, 1992
- Infrared optical properties of CVD diamond filmsJournal of Materials Research, 1990
- Electrical, crystallographic, and optical properties of ArF laser modified diamond surfacesApplied Physics Letters, 1989
- Diamond—Ceramic Coating of the FutureJournal of the American Ceramic Society, 1989
- Excimer-laser etching of diamond and hard carbon films by direct writing and optical projectionJournal of Vacuum Science & Technology B, 1986