Analytical growth mechanisms of uniaxially oriented films in ion-based processes
- 1 June 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 92 (1) , 65-70
- https://doi.org/10.1016/0040-6090(82)90188-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Optical and thermal properties of BeO thin films prepared by reactive ionized-cluster beam techniqueJournal of Applied Physics, 1980
- New developments in ionized-cluster beam and reactive ionized-cluster beam deposition techniquesThin Solid Films, 1979
- Properties of ZnO films prepared by reactive ionized cluster beam depositionSurface Science, 1979
- Effect of ion irradiation on the formation, structure and properties of thin metal filmsThin Solid Films, 1976