Nanorheology
- 1 January 2003
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- Quantitative analysis of the molding of nanostructuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Nanoreplication in polymers using hot embossing and injection moldingMicroelectronic Engineering, 2000
- Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithographyMicroelectronic Engineering, 1999
- The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossingApplied Surface Science, 1999
- Roller nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storageJournal of Microelectromechanical Systems, 1998
- Hot embossing in polymers as a direct way to pattern resistMicroelectronic Engineering, 1998
- Nano-compact disks with 400 Gbit/in2 storage density fabricated using nanoimprint lithography and read with proximal probeApplied Physics Letters, 1997
- Thermomechanical writing with an atomic force microscope tipApplied Physics Letters, 1992
- PolymermechanikPublished by Springer Nature ,1990