Light emission microscopy for thin oxide reliability analysis
- 30 June 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 36 (1-4) , 297-300
- https://doi.org/10.1016/s0167-9317(97)00066-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Strong Electric Field Heating of Conduction-Band Electrons in SiPhysical Review Letters, 1984
- Electroluminescence at high fields in silicon dioxideJournal of Applied Physics, 1976
- Switching and breakdown in filmsThin Solid Films, 1971