Highly efficient unibond silicon-on-insulator blazed grating couplers
- 18 December 2000
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 77 (25) , 4214-4216
- https://doi.org/10.1063/1.1334910
Abstract
In this letter, we report, design and fabrication of good asymmetrical Si-blazed gratings with a pitch of 383 nm, fabricated in unibond silicon-on-insulator using angled ion-beametching. An output efficiency of 84% was achieved. The devices allow efficient coupling to/from small waveguides, of the order of 1 μm in height.Keywords
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