Intensity oscillations for electron beams reflected during epitaxial growth of metals
- 15 April 1987
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 35 (12) , 6458-6460
- https://doi.org/10.1103/physrevb.35.6458
Abstract
Beam intensities in reflection high-energy electron diffraction (RHEED) are observed to oscillate during the epitaxial growth at 300 K of body-centered-cubic nickel on the (100) surface of iron and of face-centered-cubic Ni on the (100) surface of Ni. Such oscillations have been studied thoroughly by others for the growth of GaAs by molecular-beam epitaxy, where there is little doubt about the mechanisms of layer-by-layer growth. Because the RHEED oscillations are observed on vicinal surfaces [e.g., the (100) planes of the iron substrate are misoriented with respect to the surface by ∼30 mrad], the implication is that diffusion of Ni is sufficiently slow that growth does not take place by growing from the step edges, yet fast enough for completion of one monolayer before substantial development of the next. The demonstrated utility of RHEED oscillations for monitoring controlling growth in GaAs is now applicable to metal growth.Keywords
This publication has 12 references indexed in Scilit:
- Quantitative analysis of streaks in reflection high-energy electron diffraction: GaAs and AlAs deposited on GaAs(001)Physical Review B, 1986
- Ferromagnetic resonance in ultrahigh vacuum: Effect of epitaxial overlayers on FeJournal of Vacuum Science & Technology A, 1986
- Diffraction from stepped surfaces: II. Arbitrary terrace distributionsSurface Science, 1985
- Reflection high-energy electron diffraction oscillations from vicinal surfaces—a new approach to surface diffusion measurementsApplied Physics Letters, 1985
- The dependence of RHEED oscillations on MBE growth parametersJournal of Vacuum Science & Technology B, 1985
- Monte-Carlo simulations of MBE growth of III–V semiconductors: The growth kinetics, mechanism, and consequences for the dynamics of RHEED intensityJournal of Vacuum Science & Technology B, 1985
- Very thin films of Mn, Ag, and Ag–Mn epitaxially deposited on RuJournal of Vacuum Science & Technology B, 1985
- Extrinsic effects in reflection high-energy electron diffraction patterns from MBE GaAsJournal of Vacuum Science & Technology B, 1984
- Damped oscillations in reflection high energy electron diffraction during GaAs MBEJournal of Vacuum Science & Technology B, 1983
- Dynamics of film growth of GaAs by MBE from Rheed observationsApplied Physics A, 1983