Passive silicon transensor intended for biomedical, remote pressure monitoring
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 58-61
- https://doi.org/10.1016/0924-4247(90)85011-r
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- High-precision capacitative absolute pressure sensorSensors and Actuators, 1989
- Silicon microcavities fabricated with a new techniqueElectronics Letters, 1986
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- A high-sensitivity integrated-circuit capacitive pressure transducerIEEE Transactions on Electron Devices, 1982
- A monolithic capacitive pressure sensor with pulse-period outputIEEE Transactions on Electron Devices, 1980
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Miniature Passive Pressure Transensor for Implanting in the EyeIEEE Transactions on Biomedical Engineering, 1967