Indium doping of HgCdTe layers during growth by molecular beam epitaxy
- 23 June 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 48 (25) , 1733-1735
- https://doi.org/10.1063/1.96818
Abstract
Successful n-type doping of HgCdTe layers with indium during growth by molecular beam epitaxy is reported for the first time. The indium concentration is found to increase with the In flux. The doping level reaches around 1018 cm−3, which is nearly two orders of magnitude more than what can be achieved by stoichiometry deviation in as-grown samples. In the range studied, the electrical efficiency is substantial and decreases with increasing In atomic concentration. The experimental measurements are in agreement with a model suggesting that indium, which is not singly ionized, precipitates as In2Te3 and that the native acceptor defect concentration remains approximately constant. n-type doping is shown to be possible for a wide range of alloy concentrations. Good electron mobilities in the alloy are presented for the doping concentrations studied. This technique will greatly enhance the potential of molecular beam epitaxy for device applications of this material.Keywords
This publication has 6 references indexed in Scilit:
- CdTe-GaAs(100) interface: MBE growth, rheed and XPS characterizationSurface Science, 1986
- Indium ion implantation in Hg0.78Cd0.22Te/CdTeJournal of Vacuum Science & Technology A, 1985
- Molecular beam epitaxial growth of high quality HgTe and Hg1−xCdxTe onto GaAs(001) substratesApplied Physics Letters, 1984
- Latest developments in the growth of CdxHg1−xTe and CdTe–HgTe superlattices by molecular beam epitaxyJournal of Vacuum Science & Technology A, 1983
- Lattice Defects in Semiconducting Hg1 − x Cd x Te Alloys: II . Defect Structure of Indium‐DopedJournal of the Electrochemical Society, 1981
- Molecular beam epitaxy of II–VI compounds: CdxHg1−xTeJournal of Crystal Growth, 1981