Traps in Al2O3 detected by tunneling
- 1 October 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (10) , 4593-4597
- https://doi.org/10.1063/1.322384
Abstract
New structure, quite different from inelastic tunneling peaks, has been observed in electron tunneling spectra of MOM junctions. A capacitance peak is associated with this structure, which is attributed to traps in the oxide at energies smaller than those previously reported. The C‐V characteristics calculated using a single‐energy trap model agree with experimental results; however, no satisfactory explanation has yet been found to account for the strong temperature dependence of the trap energy levels.This publication has 4 references indexed in Scilit:
- Detection of dilute organic acids in water by inelastic tunneling spectroscopySurface Science, 1974
- Transient phenomena and their effect on the insulator barrier in Al-(Al oxide)-Al structures: T = 300°KThin Solid Films, 1974
- Trap structure of pyrolytic Al2O3 in MOS capacitorsApplied Physics Letters, 1973
- Molecular Vibration Spectra by Inelastic Electron TunnelingPhysical Review B, 1968