Nonlinear Growth of Periodic Ripple Structures with Different Spatial Periods in Laser Etching of GaAs
- 1 November 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (11S)
- https://doi.org/10.1143/jjap.30.3186
Abstract
The nonlinear growth of periodic surface ripples in laser-induced etching of GaAs was investigated for different spatial periods below 200 nm. Growth gains of etched grooves were more than 5%/min at the above periods both experimentally and theoretically.Keywords
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