Enhanced diffusion from interstitial trapping during solid-phase-epitaxial growth of silicon alloys
- 1 December 1984
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 70 (1-2) , 597-601
- https://doi.org/10.1016/0022-0248(84)90321-x
Abstract
No abstract availableKeywords
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