Metastable solid solutions of antimony in (100) silicon
- 1 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 731-736
- https://doi.org/10.1016/0167-5087(83)90875-x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Substitutional solid solubility limits during solid phase epitaxy of ion implanted (100) siliconApplied Physics Letters, 1982
- Supersaturated solid solutions after solid phase epitaxial growth in Bi-implanted siliconApplied Physics Letters, 1980
- Incorporation of implanted In and Sb in silicon during amorphous layer regrowthJournal of Applied Physics, 1979
- Unidirectional contraction in boron-implanted laser-annealed siliconApplied Physics Letters, 1978
- Rutherford backscattering study of crystal orientation dependent annealing effects in high-dose antimony implanted siliconApplied Physics B Laser and Optics, 1978