1H Nuclear Magnetic Resonance Study of Hydrogen Distribution in Partially Deuterated Hydrogenated Amorphous Silicon
- 1 April 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (4A) , L541
- https://doi.org/10.1143/jjap.30.l541
Abstract
Hydrogen distribution in partially deuterated hydrogenated amorphous silicon has been studied by means of 1H nuclear magnetic resonance. It has been demonstrated that the incorporation of D atoms changes the H distribution in the film.Keywords
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