Pattern formation in hot embossing of thin polymer films
- 25 May 2001
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 12 (2) , 173-177
- https://doi.org/10.1088/0957-4484/12/2/321
Abstract
We have investigated pattern formation of thin PMMA films during both hot embossing and demoulding of micro- and nanostructures. During filling of the stamp cavities, compressive and capillary effects were observed, and under certain conditions periodic patterns with characteristic length scales formed. In unstructured stamp regions the form of these patterns is affected by local differences in the pressure. For structured stamps, the self-assembly is strongly influenced by the size and the shape of the stamp cavities. Rapid expansion of trapped air resulted in viscous fingering patterns and a dewetting behaviour of the polymer could be observed. (Some figures in this article are in colour only in the electronic version; see www.iop.org)Keywords
This publication has 10 references indexed in Scilit:
- Flow behaviour of thin polymer films used for hot embossing lithographyMicroelectronic Engineering, 2000
- Electrically induced structure formation and pattern transferNature, 2000
- Lithographically induced self-assembly of periodic polymer micropillar arraysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Dynamical Instability of Thin Liquid Films Between Conducting MediaPhysical Review Letters, 1999
- Lithographically induced self-construction of polymer microstructures for resistless patterningApplied Physics Letters, 1999
- Thin Liquid Polymer Films Rupture via DefectsLangmuir, 1998
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Instability of Thin Polymer Films on Coated Substrates: Rupture, Dewetting, and Drop FormationJournal of Colloid and Interface Science, 1996
- Experimental perturbations to Saffman-Taylor flowPhysics Reports, 1995
- Viscous flows in two dimensionsReviews of Modern Physics, 1986