Substrate heater design for film deposition in oxidizing atmosphere
- 1 June 1996
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (6) , 2370-2371
- https://doi.org/10.1063/1.1147003
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Compact substrate heater for use in an oxidizing atmosphereReview of Scientific Instruments, 1994
- A versatile substrate heater for use in highly oxidizing atmospheresReview of Scientific Instruments, 1991