Compact substrate heater for use in an oxidizing atmosphere
- 1 April 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (4) , 977-980
- https://doi.org/10.1063/1.1144930
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Non-silver paste method for making thermal contact to substrates for high T/sub c/ film growthIEEE Transactions on Applied Superconductivity, 1993
- Radiative substrate heating for high-Tc superconducting thin-film deposition: Film-growth-induced temperature variationJournal of Vacuum Science & Technology A, 1992
- A substrate heater design for high temperature deposition in an oxidizing plasmaVacuum, 1992
- Heater for high T c oxide superconducting thin-film depositionReview of Scientific Instruments, 1991
- Epitaxial growth and properties of YBaCuO thin filmsMaterials Science Reports, 1989
- Inexpensive radiant substrate heater for vacuum useJournal of Vacuum Science and Technology, 1976
- A Simple Vacuum System Substrate HeaterReview of Scientific Instruments, 1972