Preparation of cubic boron nitride films by plasma-enhanced chemical vapour deposition of BF3, N2 and H2 gas mixtures
- 10 December 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 49 (1-3) , 422-426
- https://doi.org/10.1016/0257-8972(91)90094-d
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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