Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics
- 11 April 2003
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 107 (18) , 4280-4289
- https://doi.org/10.1021/jp027701y
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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