A multicomponent, multitemperature model for high density plasma processing reactors

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Abstract
We present a coupled model for neutral transport and charged species dynamics in high density plasma processing reactors. The model consists of conservation equations for mass, momentum, and energy within a multicomponent, multitemperature framework. The radially averaged one-dimensional model is applied to an electron cyclotron resonance CF4 discharge and results are presented for various pressures and flow rates. The pressure drop in the reactor is found to be significant compared to the pressure itself in high density, low pressure reactors which affects the plasma, and flow characteristics significantly. The nature of the viscous pressure drop in the reactor is also confirmed by two-dimensional fluid dynamics simulations of only the gas flow.