Oxidation of glow discharge a-Si:H
- 30 September 1982
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 25 (9) , 875-876
- https://doi.org/10.1016/0038-1101(82)90175-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Oxidation of Si and GaAs in air at room temperatureSurface Science, 1972
- The kinetics and pressure dependence of surface controlled metal oxidation reactionsSurface Science, 1969
- General Relationship for the Thermal Oxidation of SiliconJournal of Applied Physics, 1965
- Changes in the Phase and Amplitude of Polarized Light Reflected from a Film-Covered Surface and Their Relations with the Film ThicknessJournal of the Optical Society of America, 1965