Porous polycrystalline silicon: a new material for MEMS
- 1 March 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 3 (1) , 10-18
- https://doi.org/10.1109/84.285719
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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