Low pressure chemical vapour deposition of tantalum pentoxide thin layers
- 1 July 1995
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 187, 425-429
- https://doi.org/10.1016/0022-3093(95)00219-7
Abstract
No abstract availableKeywords
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- Effect of oxide additions on the polymorphism of tantalum pentoxide. IV. The system Ta2O5Ta2WO8Journal of Solid State Chemistry, 1970