a-Si3N4:H/a-Si:H Superlattices produced by plasma enhanced nitridation of a-Si:H
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 114, 777-779
- https://doi.org/10.1016/0022-3093(89)90717-5
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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