A self-calibrating barrier-detector microsystem in standard silicon circuit technology
- 19 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 867-871
- https://doi.org/10.1109/isie.1995.497300
Abstract
The realization of an ultrasound barrier system using micromachined silicon membranes is discussed. The transducer membranes are fabricated using a standard bipolar/CMOS process plus one additional etching step which facilitates the co-integration of sensor and read-out electronics. A transmitter and receiver incorporating a self calibrating scheme to overcome matching problems between transmitter and receiver resonance frequencies are described.Keywords
This publication has 2 references indexed in Scilit:
- Ultrasound-transducer using membrane resonators realized with bipolar IC technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Thermally excited silicon oxide beam and bridge resonators in CMOS technologyIEEE Transactions on Electron Devices, 1993