Control of hydrogen content of boron thin films produced in a dc toroidal discharge
- 14 September 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (11) , 798-800
- https://doi.org/10.1063/1.98870
Abstract
Hydrogenated amorphous boron films have been produced by a toroidal glow discharge of B2H6/He mixtures at low pressures (10−2 Torr). Chemically stable pure films with a low hydrogen content can be formed at a moderate substrate temperature (∼200 °C) when the diborane flow rate is raised above 10 sccm with the discharge power lowered below 100 W. The controllability of H content is potentially interesting for applications in the coating of nuclear fusion devices, as well as for use in electronic devices.Keywords
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