Silicon-on-insulator by oxygen implantation: An advanced technology
- 31 December 1988
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 8 (3-4) , 149-161
- https://doi.org/10.1016/0167-9317(88)90014-7
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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