III–V Compound semiconductor micromachined actuators for long resonator tunable fabry-pérot detectors
- 15 June 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 68 (1) , 365-371
- https://doi.org/10.1016/s0924-4247(98)00071-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Long resonator micromachined tunable GaAs-AlAs Fabry-Perot filterIEEE Photonics Technology Letters, 1997
- Free-standing AlGaAs thermopiles for improved infrared sensor designIEEE Transactions on Electron Devices, 1996
- Surface micromachined Fabry-Perot tunable filterIEEE Photonics Technology Letters, 1996
- GaAs micromachined widely tunable Fabry-Perot filtersElectronics Letters, 1995