Surface micromachined Fabry-Perot tunable filter
- 1 March 1996
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (3) , 393-395
- https://doi.org/10.1109/68.481128
Abstract
We report the fabrication of a wavelength tunable optical filter using surface micromachining technology. The center wavelength is 1.517 /spl mu/m and the transmission bandwidth is 5 nm. The device with a 50-/spl mu/m diameter aperture has an optical loss of about 5 dB. A continuous wavelength tuning of 60 nm has been demonstrated. This device may find applications in optical sensing and wavelength division multiplexing systems, and can be readily integrated with surface emitting lasers, modulators, and detectors.Keywords
This publication has 6 references indexed in Scilit:
- Micromotor grating optical switchOptics Letters, 1995
- GaAs micromachined widely tunable Fabry-Perot filtersElectronics Letters, 1995
- Electro-mechanically tunable micro Fabry-Perot filter arrayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- Optoelectronic packaging using silicon surface-micromachined alignment mirrorsIEEE Photonics Technology Letters, 1995
- Micro-machined three-dimensional micro-optics for integrated free-space optical systemIEEE Photonics Technology Letters, 1994
- Deformable-Mirror Spatial Light ModulatorsPublished by SPIE-Intl Soc Optical Eng ,1990